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Journal of Nuclear Physics, Material Sciences, Radiation and Applications
JNP Volume 4 Number 1 (August - 2016)
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Issue Date
Title
Author(s)
8-Aug-2016
Investigation of the Saturation of Elemental Concentration in the Depth Profile of Low Energy Silver Ion Implants in Silicon
Dhoubhadel, Mangal S.
;
Rout, Bibhudutta
;
Lakshantha, Wickramaarachchige J.
;
McDaniel, Floyd D.
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Author
1
Dhoubhadel, Mangal S.
1
Lakshantha, Wickramaarachchige J.
1
McDaniel, Floyd D.
1
Rout, Bibhudutta
Subject
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depth profile
1
ion implantation
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RBS
1
XPS
Date issued
1
2016